SolarLase-SE, Laser PSG SE Doping System

“SolarLase-SE2000 is a PSG laser doping tool for high-efficiency solar cell production.”



  • Laser: 5000WPH
  • Wafer Size: 156mm
  • Function: PSG Laser Doping
  • Platform: Turntable and Galvo scanner
  • High accuracy camera for alignment

SolarLase-SE is a PSG laser doping system for high efficiency c-Si solar cell production at 5000WPH. Its thermally-stable granite optics plate can house two 532nm lasers, each with its own independent beam delivery path. The beam delivery paths are flexible, where beam diameter adjustments, laser power adjustment, and shutter control can be individually controlled. The granite optics plate is essential for stable optical and mechanical performance. SolarLase-SE is a Class-I laser safe system; and it is also equipped with debris removal system to keep the work piece clean.

SolarLase-SE offers excellent wafer alignment capabilities as next generation high efficiency c-Si cells require ever more precise alignment than before. High-magnification cameras can detect wafer edges or marks on the wafer precisely, enabling precise overlay of laser-written patterns between two successive processing steps.

The application software of SolarLase-SE offers easy-to-use friendly user interface, allowing recipe creation, editing, saving and loading, making wafer processing highly efficient. For each SolarLase-SE system, we evaluate customer-specific requirements and plans so we can customize the tool to better suit individual customer needs.